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Wafer Sorting System
An automated wafer sorting system for 8" wafers

WSS2200 Screenshot_edited.jpg

Key Features :

  • Designed for 8" Wafer Handling 

  • Comes with 2x 8" SMIF Pod Opener Ports 

  • Comes with 2x Adapter for non-SMIF Pod Cassette Option 

  • Hirata 4-Axis Dual Arm ATM Robot with Budd in Wafer Mapping Sensor 

  • Hirata Wafer Pre-aligner for Wafer Orientation Check and Wafer Alignment 

  • IOSS WID120 OCR Reader 

  • Programmable Sorting Method Include Wafer Selection Sorting, Sequential Sorting & Slot-to-Slot Sorting 

  • TCP/IP Network Interface or SECS/GEM Data communication (Optional) 

  • HEPA / ULPA Filter to Meet ISO Class 5 & 6 (Optional) 


WSS3200 is an automated wafer sorting system for 8” wafers. The system comes with 2 SMIF Pod Openers and a Hirata 4-axis dual-arm ATM robot for consistent and efficient wafer handling. The system is equipped with a Hirata wafer pre-aligner for wafer centering and orientation alignment for OCR wafer ID read on the loaded wafer. Integrated with wafer mapping sensor for wafer absence, cross slot, and double wafer detection. WSS3200 is capable to perform various types of wafer sorting methods, such as direct sorting based on wafer ID, splitting, merging, slot-to-slot, and drag and drop sorting. SECS/GEM is available for upgrade for host communication.

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