Laser based Wafer Thickness and Roughness Measurement System designed by Chapman Instrument Inc., USA and OEM by QES Mechatronic Sdn Bhd. A non-contact measurement system measures several parameters in a single system. (wafer & tape thickness, roughness, TTV, bump height, bow and warp measurements)
Thickness resolution (0.1um) providing uniform TTV for productioncontrol of wafers.
Measurements after back grind or dicing provides flexibility for thicknessuniformity control.
Small focused laser spot (1 um) provides the resolution required formeasuring bumped wafers and via features.