WPS3800
Wafer Packing system
Automated packing system for wafers designed to handle 8" & 12" wafer sizes for picking and & unpacking process from various types of shipping carriers.
Key Features :
Comes with 2x FOUP/FOSB for Open Cassette for 8" Wafer with integrated Wafer Protrusion Detection Sensor and Thru Beam Wafer Mapping
2x Universal Shipping Carrier Station for Various Types of Canister and Wafer Jar with Auto-Detection for 8" & 12" Wafer Size
1x Interleaf Paper Port (Auto-Conversion between 8" & 12" Paper)
Hirata 4-Axis ATM Robot with Flip Axis (Radius-Theta-Height-Flip Axes)
Built-in Vision System for Wafer, Interleaf Paper or Spacer Detection and Built-in Height Sensor for Robotic Handling Accuracy
Description
WPS3800 is designed to handle 8" & 12" wafer sizes for the packing & unpacking process from various types of shipping carriers. The system comes with two load ports for an 8" SEMI standard open cassette and 12" FOUP cassette or 12" FOSB cassette, two load ports for an 8" canister and 12" canister (configurable to lx canister and lx wafer jar with optional cartesian robot module) and one port for interleaf paper (auto-conversion for 8" and 12" wafers). WPS3800 comes with built-in vision sensor for wafer, interleaf paper or ring spacer detection and built-in height sensor on canister & wafer jar loading port for robot's accuracy during the pick and place process.
