WID100R
Wafer Batch ID Reader system
Designed for single port for 4" SEMI standard 25 slots open cassette.
Key Features :
Designed for 100mm wafer
1x open cassettes station (based on sample cassette provided)
Cassette orientation sensors (Detect Reverse placement of cassette)
Cassette Presence and cassette tilt sensors
In-cassette wafer slot mapping function
Wafer orientation flat alignment mechanism integrated
Programmable wafer rotation for various wafer ID Locations
(Front & Back wafer ID on Orientation Flat Area)
Recipe controlled Mapping, Alignment & Wafer ID Reading
SECS/GEM communication Tools (Optional)
Description
WID100R is mainly designed for a 4" wafer size. It is designed with a single port for a 4" SEMI standard 25 slots open cassette. The system enables wafer alignment and Wafer ID reading of the complete batch in a cassette. With its multi-touch panel PC and easy-to-operate system, the user can read any wafer ID and slot position inside the carrier in just a few seconds. The compact design of the WID100R comes with the cassette presence and tilted sensor for cassette placement and wafer ID placement. The mapping, wafer alignment, and wafer ID reading are controlled by the receipt created
