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1st Optical Inspection System
Handles 4" and 6" wafer sizes for inspection, wafer mapping and defect classification

Key Features : 

  • Designed for 100mm & 150mm wafers.

  • Micro & Macro Inspection.

  • Bright-Field, Dark-Field, and NIC observation modes.

  • Motorized revolving nosepiece with 5 objective lenses.

  • Integrated with programmable XY indexing stage.

  • Wafer alignment & wafer mapping capabilities

  • User-defined reject codes & summary lot reports after inspection

  • Integrated with Inker for Defects Marking (optional)

  • Software UI for recipe control, wafer map, cassette map, and wafer alignment

  • TCP/IP network connection

  • SECS/GEM data communication (optional)


WIS1100 is designed to handle 4" and 6" wafer sizes for optical inspection, wafer mapping, and defect classification management for the semiconductor industry. The system comes with high-performance macro inspection for front and back wafers including micro inspection system. In addition to that, the micro inspection is integrated with Nikon Eclipse L200N with 5 motorized lenses. The Pre-aligner is used to ensure wafer centering and orientation accuracy before unloading and the OCR reader is for mapping retrieval from the host server to improve the process efficiency.

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