Wafer Surface Measurement System
Designed with single cassette load port to accommodate 6" and 8" SEMI standard Open Cassette.
• 1x Universal Load Port
• Hirata 3-axis ATM Robot with End Effector
• Wafer Mapping Sensor
• Hirata Wafer Alignment Module
• IOSS WID120 Reader
• Sensofar Non-Contact 3D Surface Metrology System (S Neox)
• Objective Lenses at 10x and 20x
• Sensofar Anti-Vibration Platform
• User Friendly Software Operating System
WSM1200 is designed with single cassette load port to accommodate 6-inch and 8-inch SEMI Standard Open Cassette. Hirata ATM robot provide higher performance and effective wafer handling. Integrated with Sensofar Non-Contact 3D Surface Metrology System with motorized nose-piece. The three measurement features found in S Neox - Confocal, Interferometry and Ai Focus Variation - along with excellent analysis options, each contribute to the versatility of the system and help to minimize undesirable compromises in the data acquisition. The system also integrated with Sensofar Anti-Vibration Platform to deliver accurate and fast measurement. WSM1200 is the ideal system to measure the surface height of smooth to very rough surfaces.