Wafer Batch Transfer System
Made to handle 4" and 6"wafers from input cassettes in batch mode.
WTS100G is designed for transferrring, splitting, merging or flipping the 4" wafer and 6" wafer from the input cassette in batch mode. It has one input load port and one output load port that both are both equipped with high precision sensor for wafer mapping detection and cassette placement detection. The sorting method for these tools, the wafers transfer from 4" SEMI Standard Open Cassette to 4" SEMI Standard open Cassette/Clamshell or 6 " SEMI standard open Cassette to 6" SEMI Standard Open Cassette/Clamshell.