Automated Handling System (AHS Series)
Wafer Batch ID Reader System
WID150R is mainly designed for 6 wafer size to read each wafer in the Lot. System will read Wafer IDs such as OCR, bar code, data matrix and QR code marking on the front side or backside of a wafer using IOSS WID120. Can read a complete batch of 25 wafers in less than a minute and provides outstanding performance while saving times.
Wafer Packing system
WPS3800 is equipped with Hirata wafer pre-aligner (8" & 12" wafers) for wafer positioning and orientation check, as well as OCR reader for OCR and 2D matrix code reading. It comes with 4-axis robotic arm (radius-theta-height-ip axes) and 2-axis Cartesian robot with pick and place mechanism.
Wafer Sorting System
WSS2200 is designed for 6" and 8" automated wafer sorting operation. System used Hirata dual ATM robot arm for consistent and efficient wafer handling. Hirata pre-aligner unit provides precise wafer centering and orientation alignment during the wafer transfer. The system's recipe library is controlled using an intuitive UI and simple recipe management.
Wafer Sorting System
The system comes with 2 SMIF Pod Openers, Hirata 4-axis dual arm ATM robot for consistent and efficient wafer handling. It's equipped with Hirata wafer pre-aligner for wafer centering and orientation alignment. WSS3200 can perform various type of wafer sorting method, such as direct sorting based on wafer ID, splitting, merging, slot-to-slot, drag and drop sorting.
Barcode Printing & Labelling system
WID8000 is designed to handle either 6, 8 or 12 wafer size on 12 or 16 frame size. System uses OCR reader to read Wafer ID and convert it to barcode format. Barcode generated will be printed by industrial thermal printer on a sticker label. This sticker label is transferred onto the wafer tape by the industrial robot arm.
WSS8000 is designed for 8” and 12” wafer size. The system is designed with standard 2 load ports .It is
configurable to handle 300mm wafer either in FOUP or FOSB cassette and 200mm wafer in open cassette
without any conversion needed.The system comes with pre-aligner unit for wafer centering and wafer
orientation. OCR reader for the wafer ID reading and communicating with host computer that enable the
total system integration for it’s sorting method.
Wafer Weight Sorting System
System is integrated with Hirata 4 axis ATM dual robot arm that provide high-efficiency wafer transfer process. Wafer mapping sensor is integrated onto the robot arm to accurately detect wafer presence/absence on each slot. System comes with 3 workcells to accomodate back-to-back operation without the need for operator interupt operation.
Wafer Packing System
WPS3200 is designed to handle 6" & 8" wafer for packing & unpacking process from various type of wafer shipping carriers. System equipped with Hirata PreAligner for wafer positioning and orientation and wafer ID Reader for OCR and 2D matrix code reading. Mapping sensor integrated with robotic arm to detect any wafer cross slot and double wafers during operation.
Designed for single port for 4" SEMI standard 25 slots open cassette.
WID100R is designed with single poer for 4 SEMI standard 25 slots open cassette. System enables wafer alignement and Wafer ID reading of complete batch in a cassette. With its multi touch panel PC and easy-to-operate system, the user can read any wafer ID and slot position inside the carrier in just a few seconds.