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WIS8000

1st Optical Inspection
Handles 8" and 12" wafer sizes. Capable of wafer handling, tilting for macro and micro inspection

Key Features
• Designed for 200mm and 300mm Wafers
• Comes with 2x Hirata FOUP Ports that can accommodate FOUP/FOSB Ports
• Need Hirata Adapter for 8” Open Cassette
• R-Theta Wafer handling System
• Hirata Wafer Pre-Aligner (8” & 12” wafers)
• Programmable Motorized stage with Vacuum chuck
• Wafer Mapping system
• Anti-Vibration Isolation Platform
• IOSS WID120 OCR reader
• TCP-IP & RS232 Data Interfaces

WIS8000 is designed with 2 standard load ports to accommodate FOUP, FOSB for 300mm wafer size and open cassette for 200mm wafer size. This system able to be upgraded up to 3 load ports. WIS8000 comes with robotic arm to ensure fast and precision during the wafer handling and wafer gripper module to hold the wafer during the macro inspection. The macro inspection platform comes with tilting capability for wafer front & backside inspection. System also equipped with micro inspection platform, includes high-power microscope that can store up 5 objective lens and programmable XY stage with auto/manual indexing capability.

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